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掃描電鏡

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      掃描電鏡(Scanning Electron Microscope,簡寫為SEM)是一個復雜的系統,濃縮了電子光學技術、真空技術、精細機械結構以及現代計算機控制技術。成像是采用二次電子或背散射電子等工作方式。掃描電鏡發展至今,一般將掃描電鏡配備多種附加儀器構成分析型掃描電鏡,以便對被測試樣進行多種信息的分析,其附件一般能譜儀(EDS)、電子背散射衍射(EBSD)和波譜儀(WDS)等附件。

     Scanning Electron Microscope (SEM) is a complex system that concentrates electronic optical technology, vacuum technology, fine mechanical structure and modern computer control technology. Imaging is the use of secondary or backscattering electron and other working methods. Scanning electron microscopy (sem) development up to now, the scanning electron microscopy (sem) equipped with a variety of additional instruments analytical scanning electron microscopy (sem), the analysis of the sample to be tested in a variety of information, the attachment generally spectrometer (EDS), the test results with electron backscattered diffraction (EBSD) and electron back scattering diffraction spectrometer (WDS), and other accessories.